Method and apparatus for removing material from a target by use

Details Method and apparatus for removing material from a target by use Method and apparatus for removing material from a target by use

1993-03-05

1995-04-11

Owens, Terry J.

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

427597, 118 501, 118620, 118726, C23C 1428

Patent

active

054056594

ABSTRACT:
Method and apparatus for depositing a thin layer of a target material onto a substrate by illuminating the target material with at least one ring-shaped elliptical laser beam so that a ring-shaped deposition plume is emitted from the target material, and positioning the substrate to receive the emitted material. Concentric, ring-shaped elliptical laser beams are formed by use of a multi-faceted negative axicon.

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