Resonator micro-accelerometer

Details Resonator micro-accelerometer Resonator micro-accelerometer

1991-09-24

1993-11-16

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1510

Patent

active

052612775

ABSTRACT:
A resonator micro-accelerometer sensitive to accelerations along a first direction comprises, between two supporting plates, an intermediate plate etched so as to include a rectangular frame, the sides of which extend along a first (x) and a second (y) direction perpendicular to the first one. The two directions are orthogonal to a third direction (z). A seismic mass is located inside the frame. Hanging rods extend between the frame and the mass along the second direction, on both sides of the mass. The rods have substantially the same thickness as the mass and the frame along the third direction and a small width along the first direction. Resonators extend between the frame and mass and have a small thickness along the third direction.

REFERENCES:
patent: 4663972 (1987-05-01), Gerard
patent: 4732647 (1988-03-01), Aine
patent: 4851080 (1989-07-01), Howe et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4939935 (1990-07-01), Amand
patent: 5000817 (1991-03-01), Aine
IEEE Proceedings, 89CH2704-5 by Benecke, entitled "Micromechanical Sensors", 1989, pp. 3-39-3-47.

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