1990-08-07
1991-08-13
Jackson, Jr., Jerome
357 65, H01L 3110, H01L 2944, H01L 2715
Patent
active
050400398
ABSTRACT:
A photodetector device includes a stack of a light-absorbing layer, a window layer on a substrate, and a region in the window layer formed by reversing the conductivity type of the window layer extending to the light-absorbing layer. A surface protecting film is disposed on the window layer, with a light receiving area being left uncovered. An electrode makes ohmic contact with the reversed conductivity region and surrounds the light receiving area. A metallic light-blocking film is disposed on the protecting film with an insulating gap therebetween. The inner edge of the light-absorbing film is located in alignment with or inward of the p-n junction between the reversed conductivity type region and the window layer.
REFERENCES:
Martinelli et al., "Reliability of Planar InGaAs/InP Photodiodes Passivated with Boro-Phospho-Silicate Glass", Journal of Applied Physics, vol. 63, No. 1, Jan. 1988, pp. 250-252.
Hattori Ryo
Hironaka Misao
Jackson, Jr. Jerome
Mitsubishi Denki & Kabushiki Kaisha
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