Optical scanning device and foreign matter inspection apparatus

Details Optical scanning device and foreign matter inspection apparatus Optical scanning device and foreign matter inspection apparatus

1996-09-18

1998-04-07

Le, Que

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2505594, 250234, 359281, G02F 101

Patent

active

057367353

ABSTRACT:
An optical scanning device includes a light deflection unit for deflecting a light beam emitted by a light source to be incident on an object to be irradiated, a polarization state adjusting unit for adjusting the polarization state of the light beam, so that the light beam to be incident on the object to be irradiated has a predetermined polarization state with respect to the object to be irradiated, and a rotary driving unit for rotating the light deflection unit and the polarization state adjusting unit together so that the light beam deflected by the light deflection unit scans the object to be irradiated.

REFERENCES:
patent: 4943734 (1990-07-01), Johnson et al.
patent: 5436464 (1995-07-01), Hayano et al.

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