Plasma processing apparatus having driving control section

Details Plasma processing apparatus having driving control section Plasma processing apparatus having driving control section

1991-11-29

1993-04-20

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 118723, 20429837, B44C 122

Patent

active

052039455

ABSTRACT:
A plasma processing apparatus includes a plasma processing section and a control section for controlling an operation of a driving system of the processing section. The control section includes a CPU, arranged to be separated from the plasma processing section, for outputting a digital control signal to the driving system of the plasma processing section, a first converter, arranged on the CPU side, for converting a parallel signal from the CPU into a serial signal, a second converter, arranged on the processing section side, for converting the serial signal from the first converter into a parallel signal and outputting the parallel signal to the processing section, a cable for transmitting a serial signal between the first converter and the second converter, and a timing control circuit for controlling timings of transmission/reception signals of the first and second converters.

REFERENCES:
patent: 4695700 (1987-09-01), Provence et al.
patent: 4800251 (1989-01-01), Matsuoka
patent: 4838978 (1989-06-01), Sekine et al.

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