Fishing – trapping – and vermin destroying
Patent
1987-10-30
1989-02-21
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437237, 437239, 437244, 437245, 437983, 148DIG16, H01L 21302, H01L 21469, H01L 21461
Patent
active
048065056
ABSTRACT:
A method is provided for the oxidation of a silicon or gallium arsenide surface by depositing thereon a samarium or ytterbium overlayer prior to exposure of the surface to an oxidizing atmosphere.
REFERENCES:
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patent: 4684541 (1987-08-01), Franciosi
Chang, S., "Low-Electronegativity Overlayers and Enhanced Semiconductor Oxidation: Sm on Si(111) and GaAs(110) Surfaces", Phys. Rev. B (USA), vol. 35, No. 6, Feb. 15, 1987, pp. 3013-3016.
Soukiassian, P., "Electronic Properties of O.sub.2 on Cs or Na Overlayers Absorbed on Si(100)2.times.1 from Room Temperature to 650.degree. C.", Phys. Rev. B., vol. 35, No. 8, Mar. 15, 1987, pp. 4176-4179.
A. Franciosi et al., Solid State Commun., 47, 427 (1983).
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F. U. Hillebrecht et al., Enhancement of Si Oxidation by Ce Overlayers, Brookhaven National Laboratory Internal Report (1986).
P. Soukiassian et al., J. Appl. Phys., 60, 4339 (1986).
F. U. Hillebrecht et al., Physical Review B, 34, 5377 (1986).
Everhart Byron S.
Hearn Brian E.
Regents of the University of Minnesota
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