Method for the manufacture of a short-circuit free actuated mirr

Details Method for the manufacture of a short-circuit free actuated mirr Method for the manufacture of a short-circuit free actuated mirr

1996-12-16

1999-01-12

Achutamurthy, Ponnathapura

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359291, 359221, 359846, 359855, 310328, 310366, G02B 2600

Patent

active

058597247

ABSTRACT:
A method for manufacturing an array of thin film actuated mirrors, which is capable of minimizing the effect of a heat treatment involved in the manufacture of the thin film actuated mirror, is disclosed. The method includes the steps of: providing an active matrix having an array of connecting terminals; forming a contact member on top of each of the connecting terminals; forming a thin film sacrificial layer on top of the active matrix; forming an array of actuating structures on top of the thin film sacrificial layer, wherein each of the actuating structures has a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member having a contact hole; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors. Since the contact member formed on top of the connecting terminal reduce the depth of the contact hole, cracks may not form on the thin film electrodisplacive member during the heat treatment thereof, thereby preventing the thin film electrodes in each of the actuating structures from coming into an electrical contact with each other, which, in turn, prevents a short-circuit therebetween.

REFERENCES:
patent: 5606452 (1997-02-01), Min

Affiliated with

Also associated with

Rating

Method for the manufacture of a short-circuit free actuated mirr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for the manufacture of a short-circuit free actuated mirr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the manufacture of a short-circuit free actuated mirr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1521274