Semiconductor device having spiral wiring directly covered with

Details Semiconductor device having spiral wiring directly covered with Semiconductor device having spiral wiring directly covered with

1996-12-23

1998-11-10

Hardy, David B.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257788, H01L 2940

Patent

active

058348255

ABSTRACT:
A spiral conductive layer formed over a semiconductor substrate is covered with a ferromagnetic particle containing photo-sensitive polyimide layer, and the ferromagnetic particle containing photo-sensitive polyimide layer is patterned into a ferromagnetic insulating layer inserted between turning portions of the spiral conductive layer through a lithographic process, thereby making the structure of a spiral inductor simple.

REFERENCES:
patent: 3798059 (1974-03-01), Astle et al.
patent: 4788624 (1988-11-01), Strange
patent: 5095357 (1992-03-01), Andoh et al.
patent: 5227659 (1993-07-01), Hubbard

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