Microbolometer cell structure

Details Microbolometer cell structure Microbolometer cell structure

1996-12-12

1998-11-10

Glick, Edward J.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

G01J 520

Patent

active

058347763

ABSTRACT:
A pyroelectric detector system and the pyroelectric detector element therefor having an integrated circuit (1) and a pyroelectric detector element (7) coupled to the integrated circuit and thermally isolated from the integrated circuit. The element includes a lead-containing pyroelectric layer having a pair of opposing surfaces and having a thickness to provide a resonant cavity for radiations in a predetermined frequency range. A bottom electrode (5) opaque to radiations in the predetermined frequency range is secured to one of the pair of opposing surfaces and a top electrode (9, 11) is secured to the other of the pair of opposing surfaces which is semi-transparent to radiations in the predetermined frequency range.
The top electrode is taken from the group consisting of platinum and nichrome. The lead-containing pyroelectric layer is preferably lead titanate.

REFERENCES:
patent: 3773564 (1973-11-01), Yamaka et al.
patent: 4060729 (1977-11-01), Byer et al.
patent: 4682030 (1987-07-01), Rose et al.
patent: 4792682 (1988-12-01), Endou et al.
patent: 4806763 (1989-02-01), Turnbull
patent: 4956554 (1990-09-01), Baker et al.

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