Surface position detecting system and projection exposure appara

Details Surface position detecting system and projection exposure appara Surface position detecting system and projection exposure appara

1997-01-30

1998-11-10

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250548, 356374, G01B 1100

Patent

active

058347674

ABSTRACT:
A detecting system for detecting a surface position of an object, includes a light source, a first grating having a light collecting function, wherein the first grating is illuminated with light from the light source, a second grating having a light collecting function, a first optical system for imaging the first grating onto the object in a direction oblique to the surface of the object, a second optical system for re-imaging the image of the first grating, on the surface of the object, onto the second grating, wherein a moire fringe is produced by the second grating and the re-imaged image of the first grating, and a photodetector for detecting a position of a converged point of convergent light as produced by the moire fringe, wherein the surface position information of the object is determined on the basis of information related to the converged point position as detected by the photodetector.

REFERENCES:
patent: 5610719 (1997-03-01), Allen et al.
patent: 5633721 (1997-05-01), Mizutani

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