Positioning system and method and apparatus for device manufactu

Details Positioning system and method and apparatus for device manufactu Positioning system and method and apparatus for device manufactu

1996-02-16

1999-01-12

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

355 53, G03F 900

Patent

active

058585877

ABSTRACT:
A positioning system wherein a holding surface for holding a substrate is movable relative to a base in directions of X, Y and Z axes and in rotational directions about the X, Y and Z axes, wherein there are plural guiding devices associated respectively with motions in the directions of X, Y and Z axes and in the rotational directions about the X, Y and Z axes, respectively, and wherein each guiding device comprises a non-contact static bearing device.

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Review of Scientific Instruments, Jul., 1987, USA, vol. 58, No. 7, pp. 1303-1305, Greene, G.L., "Accurate positional servo for use with pneumatically supported masses and vibrationally isolated tables", *abstract*.
Patent Abstracts of Japan, vol. 014, No. 502 (E-0997), published 2 Nov. 1990, English Abstract of Japanese Patent No. 02-207520, Aug. 17, 1990, *abstract*.

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