Method of alignment for CCD and the apparatus of the same

Details Method of alignment for CCD and the apparatus of the same Method of alignment for CCD and the apparatus of the same

1997-11-12

1999-09-14

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

2505593, G01N 2186

Patent

active

059526696

ABSTRACT:
The double-stair-like capacitor formed on a semiconductor substrate includes a first storage node having stair-like structurs in cross section view to increase the area of the first storage node. A dielectric layer substantially conformally covers a surface of the first storage node. A second storage node having a surface substantially conformally contacts the dielectric layer.

REFERENCES:
patent: 5477057 (1995-12-01), Angeley et al.

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