Soft edge mask

Details Soft edge mask Soft edge mask

1988-11-07

1991-12-31

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

430333, 430394, 430396, 430494, 430397, 353 29, 353 30, 354120, 355 70, 355125, G03F 900, G03B 2728

Patent

active

050771540

ABSTRACT:
A soft edge mask comprises a panel having an opaque area forming a mask portion and defined by a clearly focussed edge of a predetermined shape, a transparent area forming a clear portion defined by a clearly focussed edge of the same said predetermined shape, and a margin portion extending between the opaque portion and the clear portion, the margin portion having a light transmissability varying progressively from the edge of the mask portion to the edge of the clear portion, and, at each position between the mask portion and the clear portion, being clearly focussed and having the same said predetermined shape.

REFERENCES:
patent: 4093460 (1978-06-01), Weinstein
patent: 4165163 (1979-08-01), Lemanski
patent: 4208811 (1980-06-01), Junowicz
patent: 4272186 (1981-06-01), Plummer
patent: 4284715 (1981-08-01), Horst
patent: 4298274 (1981-01-01), Rees et al.
patent: 4301232 (1981-11-01), Kullen
patent: 4374911 (1983-02-01), Hartley
patent: 4423939 (1984-01-01), Hayles
patent: 4440840 (1984-04-01), Yamaguchi
patent: 4600606 (1986-07-01), Zink

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