Temperature, pressure, vibration or humidity sensor based on ref

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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25023119, 374205, 73862624, G01D 534

Patent

active

055324797

ABSTRACT:
A multi-function sensor using a semiconductor laser capable of sensing a value of a measurement object such as temperature, humidity, pressure or vibration on the basis of a variation in the distance between a measurement object medium adapted to respond to a variation in the measurement object and a focus of laser beams projected onto the measurement object medium and thereby capable of measuring the measurement object in a high accuracy irrespective of a variation in the quantity of laser beams depending on a variation in surrounding circumstance.

REFERENCES:
patent: 4002975 (1977-01-01), Erickson et al.
patent: 4521683 (1985-06-01), Miller
patent: 4672199 (1987-06-01), Anderson et al.
patent: 4762426 (1988-08-01), Foss
patent: 5031987 (1991-07-01), Norling
patent: 5146080 (1992-09-01), Opheij
patent: 5351547 (1994-10-01), Grudzien, Jr. et al.

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