Surface configuration inspection apparatus with moving grating

Details Surface configuration inspection apparatus with moving grating Surface configuration inspection apparatus with moving grating

1987-04-13

1988-05-03

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01N 2186

Patent

active

047422378

ABSTRACT:
A surface configuration inspection apparatus comprising a movable member having a grating with parallel equidistant dark and light lines on a transparent plate, and a driving device for causing the vertical movement of the movable member. A projection device projects an image of the grating onto a screen disposed by the object to be inspected. A detector detects the image of the grating on the screen by reflection from a reflective surface on the object to be inspected and displays a deformed pattern of the grating. The deformed pattern changes with the movement of the grating. According to the deformation and the change of the deformation, defects such as projections, depressions, scratches or the like can be identified as to their size and shape.

REFERENCES:
patent: 4520388 (1985-05-01), Kellie
patent: 4585947 (1986-04-01), Liptay-Wagner et al.

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