Boots – shoes – and leggings
Patent
1994-05-18
1996-10-01
Ramirez, Ellis B.
Boots, shoes, and leggings
374121, H05B 650
Patent
active
055616127
ABSTRACT:
Temperature nonuniformity across a semiconductor wafer during both the transient and steady state of a typical rapid thermal processing (RTP) cycle has been a deterrent in using RTP in many VLSI unit processes. The present invention consists of a three-dimensional mathematical model to study the temperature variation across a wafer in an RTP oven for given lamp power settings, during both the transient and steady state of a typical thermal cycle and control a heating lamp back by a computer program. The simulation package has been written in FORTRAN, and the validity of various models have been checked by performing a series of oxidation experiments.
REFERENCES:
patent: 4927226 (1990-05-01), Ortiz, Jr.
patent: 4948937 (1990-08-01), Blank et al.
patent: 4956538 (1990-09-01), Moslehi
patent: 4982347 (1991-01-01), Rackerby et al.
patent: 5098199 (1992-03-01), Amith
patent: 5099442 (1992-03-01), Furuta et al.
patent: 5151871 (1992-09-01), Matsumura et al.
patent: 5249142 (1993-09-01), Shirakawa et al.
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5359693 (1994-10-01), Nenyei et al.
patent: 5367606 (1994-11-01), Moslehi et al.
patent: 5471033 (1995-11-01), DiPaolo et al.
Micro)n Technology, Inc.
Peeso Thomas
Ramirez Ellis B.
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