Cold cathode ionization gauge control for vacuum measurement

Details Cold cathode ionization gauge control for vacuum measurement Cold cathode ionization gauge control for vacuum measurement

1975-10-06

1976-12-28

Rolinec, R. V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Frequency of cyclic current or voltage

323 1, 250386, 307235R, 328262, G01N 2700, H01J 3928

Patent

active

040004570

ABSTRACT:
A cold cathode ionization gauge controller utilizing a periodically varying potential across the gauge tube at higher pressure and substantially constant potential at low pressure provides a wide-range pressure measurement capability from about 10.sup.-.sup.1 to about 10.sup.-.sup.7 torr.

REFERENCES:
patent: 2956156 (1960-10-01), Crowther et al.
patent: 3379967 (1968-04-01), Herrwerth et al.
patent: 3447072 (1969-05-01), Sheldon
patent: 3518532 (1970-06-01), English
patent: 3872377 (1975-03-01), Kageyama et al.

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