Interferometer

Details Interferometer Interferometer

1990-03-01

1991-12-31

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

050766953

ABSTRACT:
An interferometer for measuring the spherical accuracy of a surface to be measured in accordance with the light and dark distribution condition of interference fringes produced by the interference between a measuring light beam and a reference light beam. A part of the light from a light source is projected as a measuring light beam to a surface to be measured and its reflected light beam from the surface to be measured is superimposed on a reference light beam separately derived from the source light on a two-dimensional sensor. Arranged obliquely between the light source and the surface to be measured is a flat mirror formed therethrough with a pinhole for producing a spherical wave upon the passage of the light source therethrough. A spherical wave of light diffracted and emitted from the pinhole of the mirror is used as the measuring light beam. Also, the spherical wave produced by diffraction from the pinhole is also used for the reference light beam.

REFERENCES:
patent: 4575247 (1986-03-01), Tansey
patent: 4624569 (1986-11-01), Kwon
patent: 4693604 (1987-09-01), Tenjinbayashi
patent: 4744658 (1988-05-01), Holly

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