Gas rate sensor for detecting horizontal angular velocity

Details Gas rate sensor for detecting horizontal angular velocity Gas rate sensor for detecting horizontal angular velocity

1995-02-07

1997-06-24

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Thermal type

7350403, 7350406, G01P 900

Patent

active

056419031

ABSTRACT:
A gas rate sensor comprising a sensor body, a pump control device and a resistive bridge circuit. Semiconductor substrates are accurately photoengraved by semiconductor fabrication techniques to integrally form a pair of heat-generating and heat-sensitive resistive elements, a gas passageway, a pump casing, and other components in the sensor body. The pump control device controls a piezoelectric pump for creating a gas flow. The resistive bridge circuit is composed of the aforementioned resistive elements and a pair of reference resistors. The pump control device sets the gas flow rate to a given value to detect only the angular velocity acting in the direction of yaw. The angular velocity can be detected accurately with high sensitivity.

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