Irradiative probe system

Details Irradiative probe system Irradiative probe system

1986-07-14

1988-05-03

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, G01B 902

Patent

active

047416203

ABSTRACT:
In a probe system which enables high sensitivity to be achieved in a differential phase contrast optical or electron microscope, a focused beam is periodically deflected over the surface of an object and resulting phase modulation of the beam (related to the phase structure of the object) is sensed. In one embodiment, the beam (18) is derived from a laser (10) and light reflected from the irradiated object (24) is received by a photodetector (26), where it interferes with a reference beam (28) also derived from the laser (10) but shifted in frequency by means of a Bragg cell (30); the detection system includes a vector voltmeter (40) sensing the amplitude and phase of a signal component at the deflection frequency. Also described are other optical embodiments utilizing different forms of interferometer and/or detection system, and an embodiment using an electron probe instead of a laser probe.

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