Method of manufacturing physical quantity detector

Details Method of manufacturing physical quantity detector Method of manufacturing physical quantity detector

1995-02-24

1996-07-02

Vo, Peter

Metal working

Electric condenser making

29594, 29595, 73862041, 3612833, H01G 700, G01L 118, G01L 912, G01P 1509

Patent

active

055310028

ABSTRACT:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

REFERENCES:
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4384899 (1983-05-01), Myers
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4586109 (1986-04-01), Peters et al.
patent: 4615105 (1986-10-01), Wada et al.
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 5182515 (1993-01-01), Okada
patent: 5317922 (1994-06-01), Bomback et al.

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