Method for fabricating low loss crystalline silicon waveguides b

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437 26, 350 9612, H01L 21425, G02B 610

Patent

active

047896426

ABSTRACT:
A method of fabricating low loss silicon optical waveguides by high energy ion implantation which converts a buried region into dielectric material. The top silicon surface can them be etched or formed into waveguides that are isolated by the buried dielectric. Annealing of the top silicon layer can be used to improve optical quality and additional silicon can be added to the top surface waveguides by epitaxial growth.

REFERENCES:
patent: 3922062 (1975-11-01), Uchida
patent: 4002512 (1977-01-01), Lim
patent: 4030943 (1977-06-01), Lee et al.
patent: 4048591 (1977-09-01), Auracher
patent: 4066482 (1978-01-01), Shaw
patent: 4329016 (1982-05-01), Chen
patent: 4420873 (1983-12-01), Leonberger et al.
patent: 4426440 (1984-01-01), Thompson
patent: 4439004 (1984-03-01), Hunsperger et al.
patent: 4472020 (1984-09-01), Evanchuk
patent: 4585299 (1986-04-01), Strain
Rose, "High Density Optical Waveguide Array" IBM Tech. Disc. Bull., vol. 23, No. 10(1981) pp. 4453-4454.
Article entitled "Multimode 2.times.2 Optical Crossbar Switch", reprinted from Electronics Letters, 27th Apr. 1978, No. 9, pp. 283-284.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for fabricating low loss crystalline silicon waveguides b does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating low loss crystalline silicon waveguides b, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating low loss crystalline silicon waveguides b will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1493994

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.