Fishing – trapping – and vermin destroying
Patent
1987-03-26
1988-12-06
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 26, 350 9612, H01L 21425, G02B 610
Patent
active
047896426
ABSTRACT:
A method of fabricating low loss silicon optical waveguides by high energy ion implantation which converts a buried region into dielectric material. The top silicon surface can them be etched or formed into waveguides that are isolated by the buried dielectric. Annealing of the top silicon layer can be used to improve optical quality and additional silicon can be added to the top surface waveguides by epitaxial growth.
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Article entitled "Multimode 2.times.2 Optical Crossbar Switch", reprinted from Electronics Letters, 27th Apr. 1978, No. 9, pp. 283-284.
Lorenzo Joseph P.
Soref Richard A.
Chaudhuri Olik
Morris Jules Jay
Singer Donald J.
The United States of America as represented by the Secretary of
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