Method for measuring resistances and capacitances of electronic

Details Method for measuring resistances and capacitances of electronic Method for measuring resistances and capacitances of electronic

1981-07-20

1984-07-17

Krawczewicz, Stanley T.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Frequency of cyclic current or voltage

324 60C, 324 62, 324 713, 324 73PC, G01R 2700

Patent

active

044608667

ABSTRACT:
A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current I.sub.A by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t.sub.1) and U(t.sub.2) on the potential curve.

REFERENCES:
patent: 3239664 (1966-03-01), Farell
patent: 3315156 (1967-04-01), Keller
patent: 3373353 (1968-03-01), Harris
patent: 3403332 (1968-09-01), Watanabe et al.
patent: 3464007 (1969-08-01), Williams
patent: 3531716 (1970-09-01), Tarui et al.
H. P. Feuerbaum Article entitled: "VLSI Testing Using the Electron Probe," Scanning Electron Microscopy, 1979, vol. 1, pp. 285-296 (1979).

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