Integrated circuit and method

Details Integrated circuit and method Integrated circuit and method

1995-06-07

1997-07-15

Dang, Trung

Fishing, trapping, and vermin destroying

437133, 437912, 437 31, 437 32, H01L 2120

Patent

active

056482949

ABSTRACT:
Heterojunction bipolar transistors (130) with bases (138) including an etch stop element are disclosed. The preferred embodiment devices have Al.sub.z Ga.sub.1-z As emitters (140) and GaAs collectors (136) and bases (138) with In.sub.y Ga.sub.1-y As added to the bases (138) to stop chloride plasma etches.

REFERENCES:
patent: 4939562 (1990-07-01), Adlerstein
patent: 5021361 (1991-06-01), Kinoshita et al.
patent: 5206524 (1993-04-01), Chen et al.

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