Wafer handling apparatus and method

Details Wafer handling apparatus and method Wafer handling apparatus and method

1986-08-27

1988-12-06

Dorner, Kenneth J.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414222, 414225, 414749, 4147446, B65H 508

Patent

active

047892943

ABSTRACT:
A wafer processing apparatus, comprising a wafer processing station for processing a wafer, a key input portion for inputting wafer processing instructions into the wafer processing station, and wherein at least one of a portion for accommodating a wafer carrier for carrying the wafer, a mechanism for taking the wafer out of the wafer carrier and putting it back into the wafer carrier, wafer alignment station for aligning the wafer and a wafer observing station for allowing an operator to observe the wafer, is disposed at a front side of the apparatus to which the operator faces when actuating the key input portion.

REFERENCES:
patent: 3823836 (1974-07-01), Cheney et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3921788 (1975-11-01), Roberson Jr. et al.
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4553069 (1985-11-01), Purser
patent: 4568234 (1986-02-01), Lee et al.
patent: 4582191 (1986-04-01), Weigand

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