Device for optically measuring an object using a laser interfero

Details Device for optically measuring an object using a laser interfero Device for optically measuring an object using a laser interfero

1998-09-15

2000-07-04

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

359370, G01B 902

Patent

active

060846720

ABSTRACT:
A device is provided for optical measurement of an object, in particular for path and/or vibration measurements, using a laser interferometer, wherein a measuring beam is input into the beam path of a microscope. The device has a mechanism for shifting the measuring beam in an approximately parallel manner. The input of the measuring beam is accomplished via a camera connection of the microscope. The shifting device causes a shift of the impact point of the measuring beam on the measurement object, and the measuring beam reflected back or scattered from the measurement object is decoupled via the camera connection from the beam path of the microscope.

REFERENCES:
patent: 5880465 (1999-03-01), Boettner et al.
Sietse M. van Netten, "Laser interferometer microscope for the measurement of nanometer vibrational displacements of a light-scaterring microscopic object", J. Acoustical Society of America, 83 (4): 1667-1674 (Apr. 1988).
Hans-Georg Kapitza, "Konfokale Laserscan-Mikroskopie zur optischen Vermessung der Mikrotopographie von Oberflachen und Schichten", Technisches Messen, 63: 136-141 (Apr. 1996).
B. Stoffregen, "Flachenabtastendes Laser-Doppler-Schwingungsanalysesystem", Technisches Mesen 51(11): 394-397 (1984).

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