Imaging method for manufacture of microdevices

Details Imaging method for manufacture of microdevices Imaging method for manufacture of microdevices

1997-05-16

2000-07-04

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742

Patent

active

060846550

ABSTRACT:
An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions is disclosed, which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and illuminating the pattern with light from the light source.

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