Process for growing a superficial dielectric structure upon a su

Details Process for growing a superficial dielectric structure upon a su Process for growing a superficial dielectric structure upon a su

1979-08-27

1981-05-19

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

148 63, 204 38A, 4274193, B05D 306

Patent

active

042685354

ABSTRACT:
In a process for producing a surface compound between a substrate and a reactive species a thin layer permeable to the species in question is deposited on the substrate. A particularly interesting case is the oxidation of a substrate of gallium arsenide, the thin layer being made from zirconia doped with lime.

REFERENCES:
patent: 2868702 (1959-01-01), Brennan
patent: 3362842 (1968-01-01), Kramer
patent: 3915119 (1975-10-01), Roy et al.
patent: 3971710 (1976-07-01), Romankiw
patent: 4108736 (1978-08-01), Rigo et al.
patent: 4133724 (1979-01-01), Hartnagel et al.

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