Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1998-07-01
2000-07-04
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, H01J 902
Patent
active
060830697
ABSTRACT:
A micro vacuum tube is described. The process for manufacturing it begins with the deposition of two layers of polysilicon or metal, separated by dielectric layers, topping them with a layer of silicon nitride, and forming these into the shape of a disk. A hole is etched in the silicon nitride and then lined with a spacer, causing the width of the hole to decrease from top to bottom. When the hole is partially filled with a sacrificial layer the latter has a depression at its center which may be used as a mold for a microtip. To allow for easy removal of the sacrificial layer, pole holes are etched in it. These become support poles after the microtip material has been deposited over the sacrificial layer (which gets removed in its entirety). As an alternative to a microtip, a micro razor edge may be used for the cold emitter. A cap deposited over the structure while it is in vacuo serves to keep it under permanent vacuum.
REFERENCES:
patent: 5266530 (1993-11-01), Bagley et al.
patent: 5569973 (1996-10-01), Zimmerman
patent: 5576986 (1996-11-01), Matsuzaki et al.
patent: 5795208 (1998-08-01), Hattori
Ackerman Stephen B.
Ramsey Kenneth J.
Saile George O.
Taiwan Semiconductor Manufacturing Company
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