Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1992-09-24

1994-03-08

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73708, 73726, 73756, 338 4, G01L 906

Patent

active

052917886

ABSTRACT:
A semiconductor pressure sensor according to the invention comprises a first semiconductor substrate and a second semiconductor substrate, disposed around the first substrate, so that signals obtained by the semiconductor pressure sensor under static or differential pressure conditions can be properly corrected and both static and differential pressures can be detected accurately and reliably measured on the same semiconductor substrates. Another object of the invention is provide a semiconductor pressure sensor which utilizes a single substrate with an aperture, which acts as a pressure overload stop mechanism, and which does not suffer from any effects of diaphragm deformation as a result of possible pressure overload.

REFERENCES:
patent: 4528855 (1985-07-01), Singh
patent: 5107710 (1992-04-01), Huck et al.

Affiliated with

Also associated with

Rating

Semiconductor pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-148037