Ion-implantation method in solid materials for implanting impuri

Details Ion-implantation method in solid materials for implanting impuri Ion-implantation method in solid materials for implanting impuri

1989-12-05

1992-03-17

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 29, 2504922, H01L 21266

Patent

active

050968416

ABSTRACT:
An ion-implantation method for implanting desired impurities selectively in a solid material is provided that comprises forming a blocking film on the solid material, and implanting the impurities in the solid material with the blocking film used as a shielding mask for ion implantation, wherein the blocking film is formed to have a gentle slope at its edge portions.

REFERENCES:
patent: 4566175 (1986-01-01), Smagling et al.
patent: 4638551 (1987-01-01), Einthoven
patent: 4728617 (1988-03-01), Woo et al.
patent: 4755479 (1988-07-01), Miura
patent: 4818714 (1989-04-01), Haskell

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