Coherent light generators – Particular beam control device
Patent
1996-07-18
1998-06-02
Lee, John D.
Coherent light generators
Particular beam control device
372 20, 372 32, H01S 308, H01S 3137
Patent
active
057612366
ABSTRACT:
A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.
REFERENCES:
patent: 3611436 (1971-10-01), Rigrod
patent: 3775699 (1973-11-01), Cassels
patent: 5150370 (1992-09-01), Furuya et al.
Abstract and handouts of an Aug. 15-18, 1995 conference, in Colorado Springs, Colorado, from First International Symposium on 193nm Lithography, "ArF Excimer Laser with High Repetition Rate for DUV Lithography," by R. Patzel, I. Bragin, U. Rebhan & d. Basting, 21 pages in length.
Y. G. Basov, "Telescopic and dispersive prism devices for laser technology," J. Opt. Technol., vol. 62 (3), Mar. 1995, pp. 141-152.
Heist Peter
Kleinschmidt Jurgen
Lambda Physik Gesellschaft zur Herstellung von Lasern mbH
Lee John D.
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