Interferential position measuring device with three detectors

Details Interferential position measuring device with three detectors Interferential position measuring device with three detectors

1996-06-12

1998-06-02

Dzierzynski, Paul M.

Optical: systems and elements

Diffraction

From grating

356356, 250237G, G01B 1102

Patent

active

057609594

ABSTRACT:
An optical device, such as a position measuring instrument, having a source of light and a diffraction element for receiving the light, creating partial light beams which interfere with one another, and producing from the interfering partial light beams a first beam of light projecting along a first direction and producing a second beam of light projecting along a second direction. The optical device further includes a first optical projecting element positioned to receive the first beam of light and producing a first focused beam of light and a second optical projecting element positioned to receive the second beam of light and producing a second focused beam of light. Furthermore, the optical device has a first photodetector to receive and detect the first focused beam of light and a second photodetector to receive and detect the second focused beam of light.

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