Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1996-12-18
1998-06-02
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
25055923, G01B 1124
Patent
active
057609063
ABSTRACT:
A shape measurement apparatus of this invention includes (i) an optical distance measuring device which measures the distance to the point to be measured on the object to be measured, (ii) a position setting/changing mechanism which sets and changes the relative positional relationship between the object to be measured and the optical distance measuring device, and can set, for each point to be measured, a plurality of different angles including .alpha. and -.alpha. (0.degree..ltoreq..alpha..ltoreq.90.degree.) in an identical plane as the tilt angle of the surface of the object to be measured with respect to a plane perpendicular to the optical axis of the optical distance measuring device, (iii) a position detection mechanism for detecting the relative position between the optical distance measuring device and the point to be measured, and (iv) a shape data forming unit for forming shape data of the object to be measured on the basis of position data and distance data which respectively represent the relative position and the distance between the point to be measured and the optical distance measuring device. This arrangement can reduce measurement errors caused by the irradiation angle of the measurement light from the optical distance measuring device to the object to be measured.
REFERENCES:
patent: 5118192 (1992-06-01), Chen et al.
patent: 5369490 (1994-11-01), Kawai et al.
patent: 5548405 (1996-08-01), Motosugi
"Patent Abstracts of Japan", No. 07-0555438, Mar. 1995, English abstracts.
Evans F. L.
Technology Research Association of Medical and Welfare Apparatus
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