Method and apparatus for measuring depth of a depression in a pa

Details Method and apparatus for measuring depth of a depression in a pa Method and apparatus for measuring depth of a depression in a pa

1997-01-21

1999-11-09

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356349, G01B 902

Patent

active

059824891

ABSTRACT:
A depth-measurement is disclosed for highly accurately measuring the depth (step difference) of depressions in a pattern in which depressions and protrusions periodically repeat, as in, e.g. a fine groove pattern. The depth measurement method is also for optically measuring the depth of depressions in a pattern formed so that depressions and protrusions periodically repeat in a specified direction on a substrate. The depth of the depressions is calculated based on photoelectrically converted signals of an integrated light flux of a first and second light beam obtained when an interference pattern is formed on the pattern by shining a first and second coherent light beam onto the pattern, and on the wavelengths of the first and second light beams. To highly accurately measure the depth (step difference) of the depressions in such a pattern formed so that depressions and protrusions periodically repeat in a specified direction, the depth of the depressions is calculated based on photoelectrically converted signals of the integrated light flux of the first and second light beams obtained for each of the multiple wavelengths, and on the multiple wavelengths.

REFERENCES:
patent: 3819274 (1974-06-01), Koulicovitch et al.
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 5384639 (1995-01-01), Wickramasinghe
patent: 5448357 (1995-09-01), Muraki

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