Static megasonic cleaning system for cleaning objects

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion

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Details

134 1, 134902, B08B 312

Patent

active

053834844

ABSTRACT:
A static megasonic cleaning system for cleaning multiple objects having an exterior surface includes a cassetteless vessel having an internal cavity for receiving the multiple objects and an array of megasonic transducers mounted on the vessel. Each transducer emits a focused beam of megasonic energy into the cavity and is arranged so that the emitted beams from all of the transducers collectively envelop the entire exterior surface of the objects. The transducers are staggered to avoid internal mounting structure within the vessel and avoid unnecessary dissipation of the megasonic energy.

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