Semiconductor processing apparatus and module

Details Semiconductor processing apparatus and module Semiconductor processing apparatus and module

1992-11-02

1995-01-24

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134902, 134201, 134 76, 134115R, 118500, B08B 302

Patent

active

053834828

ABSTRACT:
Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the equipment. Thus, the present invention makes it possible to reduce equipment size and achieve highly efficient factory automation. Furthermore, in a semiconductor processing equipment module according to the present invention, each item of semiconductor processing equipment has its own ID-card stocking device. As a result, the number of case carriers can be reduced and a space reduction with increased factory automation can be easily realized.

REFERENCES:
patent: 4568234 (1986-02-01), Lee et al.
patent: 4658960 (1987-04-01), Iwasa
patent: 4985722 (1991-01-01), Ushijima et al.
patent: 5030057 (1991-07-01), Nishi et al.

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