Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1998-01-14
1999-11-09
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
With detector
250398, 2504922, H01J 37304
Patent
active
059819545
ABSTRACT:
An electron beam exposure apparatus, which has an electron source for emitting an electron beam, and an irradiation electron optical system which is arranged between the electron source and a first object, including a portion for transmitting an electron beam, and includes a plurality of electron lenses, and projects the electron beam transmitted through the first object onto a second object to expose it via a reduction electron optical system, acquires information associated with the intensity distribution of the electron beams to be irradiated onto the first object, and adjusts the electron optical characteristics of the irradiation electron optical system on the basis of the acquired information associated with the intensity distribution.
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Anderson Bruce C.
Canon Kabushiki Kaisha
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