Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
Patent
1996-10-21
1998-06-02
Niebling, John
Stock material or miscellaneous articles
Structurally defined web or sheet
Discontinuous or differential coating, impregnation or bond
438253, H01L 218042
Patent
active
057598886
ABSTRACT:
Two embodiments of a method are described for fabricating a DRAM cell having a T or Y shaped capacitor connected to a MOS transistor with source and drain regions. In a first embodiment, the method comprises using two masks to form a cylindrical hole partial through the insulating layer and a concentric contact hole over the source. A first conductive layer is formed over the first insulating layer, at least completely filling the trench and filling the contact hole. In a key step, the first polysilicon layer is chemically mechanically polished thereby forming a T shaped storage electrode. Next, a capacitor dielectric layer and a top electrode are sequentially formed over at least the T shaped storage electrode. The second embodiment form the contact hole and trench as described above. A conformal first conductive layer is formed over the first insulating layer, filling the contact hole and covering the sidewalls and bottom of the trench, but not filling the trench. A dielectric layer is formed over the first conductive layer at least fills the trench. The dielectric layer and the first conductive layer are chemically mechanically polished forming the Y shaped electrode. Next, a capacitor dielectric layer and a top electrode are formed over the Y shaped storage electrode.
REFERENCES:
patent: 4944836 (1990-07-01), Beyer et al.
patent: 5364809 (1994-11-01), Kwon et al.
patent: 5399518 (1995-03-01), Sim et al.
patent: 5451539 (1995-09-01), Ryou
patent: 5552334 (1996-09-01), Tseng
patent: 5563089 (1996-10-01), Jost et al.
Liang Mong-Song
Wang Chen-Jong
Ackerman Stephen B.
Chang Joni Y.
Niebling John
Saile George O.
Stoffel William J.
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