Method of making a surface micro-machined silicon pressure senso

Details Method of making a surface micro-machined silicon pressure senso Method of making a surface micro-machined silicon pressure senso

1995-08-28

1998-06-02

Niebling, John

Fishing, trapping, and vermin destroying

437203, 437901, 437921, 437927, H01L 2144, H01L 21465

Patent

active

057598703

ABSTRACT:
Methods for surface micro-machining silicon wafers, including coating cavity sidewalls with oxidation-resistant material to prevent lateral oxidation. This in turn prevents "bird's beak" during formation of a diaphragm. The methods are useful for, among other things, the manufacture of absolute-type pressure sensors. Along with bulk micro-machining techniques, the methods can be used to produce gauge- and differential-type pressure sensors, as well.

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