Organic solvent soluble photoresists which are developable in aq

Details Organic solvent soluble photoresists which are developable in aq Organic solvent soluble photoresists which are developable in aq

1996-04-19

1998-12-15

Wilson, Donald R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

522 57, 522 59, 522120, 528129, 528153, 528230, 525312, C08J 328, C08G 824, C08G 820

Patent

active

058498087

ABSTRACT:
A polymer which is insoluble in aqueous-alkaline developer solutions, and comprises structural units of the formula (I): ##STR1## in which R.sub.2 is hydrogen, C.sub.1 -C.sub.18 alkyl, C.sub.5 -C.sub.10 cycloalkyl, C.sub.5 -C.sub.14 aryl, C.sub.6 -C.sub.30 aralkyl, R.sub.3 is C.sub.1 -C.sub.18 alkyl, C.sub.5 -C.sub.10 cycloalkyl, C.sub.5 -C.sub.14 aryl, or C.sub.6 -C.sub.30 aralkyl, it being possible for the alkyl, cycloalkyl, aryl, or aralkyl groups to be substituted if desired by one or more hydroxyl groups or nitro groups or by one or more halogen atoms, and X is a k+1 valent organic radical, k being a number from 1 to 5, and 1 is a number from 0 to 4, in a quantity such that the cleavage products obtained by reaction with an acid are soluble in aqueous-alkaline developer solutions, is suitable as a binder for DUV photoresists of high processing stability, high contrast, and good resolution.

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Flory, "Principles of Polymer Chemistry", Cornell University Press, Ithaca, New York, p. 361 (1953).
"Hawley's Condensed Chemical Dictionary", 12th ed., Van Nostrand Reinhold Co., New York, p. 325 (1993).

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