Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-04-18
1984-12-11
Weisstuch, Aaron
Metal working
Method of mechanical manufacture
Assembling or joining
29571, 29578, H01L 2180
Patent
active
044869444
ABSTRACT:
A single polycrystalline silicon configuration for a memory cell in a static MOS RAM and a method of fabricating the same are described. Three conductivity regions are utilized to form each memory cell. A first conductivity region is formed in the substrate to create a buried ground line and sources and drains of transistors. A second conductivity region is formed within an insulation layer and above the first conductivity region to create a word line, gate regions of the transistors, load resistors, and a power supply line. The power supply line is oriented directly above and parallel to the ground line. A third conductivity region is formed on the surface of the insulation layer to create data lines. The number of process steps and the size of the memory cell are reduced by this configuration.
REFERENCES:
patent: 4110776 (1978-08-01), Rao et al.
patent: 4207585 (1980-06-01), Rao
patent: 4240097 (1980-12-01), Raymond, Jr.
patent: 4246593 (1981-01-01), Bartlett
Auyang Hunter L.
Inmos Corporation
Manzo Edward D.
Weisstuch Aaron
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