Method for depositing indium tin oxide layers in organic light e

Details Method for depositing indium tin oxide layers in organic light e Method for depositing indium tin oxide layers in organic light e

1997-09-12

1999-11-09

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

438 99, 257 40, 313506, H01L 5140

Patent

active

059813067

ABSTRACT:
A method is disclosed for fabricating organic light emitting devices (OLEDS) containing an indium tin oxide (ITO) layer that is deposited onto a fragile layer. The ITO layer is fabricated using a low, non-damaging, ITO deposition rate until a protective ITO layer is formed, at which point the ITO deposition rate is increased to a substantially higher deposition rate without causing damage to the underlying layers. OLEDs fabricated using the accelerated ITO deposition rate could be made with I-V characteristics having no practically discernible difference from the I-V characteristics of an OLED in which the ITO deposition rate was kept at a low deposition rate throughout the ITO deposition process.

REFERENCES:
patent: 4950950 (1990-08-01), Perry et al.
patent: 5703436 (1997-12-01), Forrest et al.
C.W. Tang et al, "Organic electroluminescent diodes," Appl. Phys. Lett. 51 (12), Sep. 21, 1987.
S.R. Forrest te al., "Organic emitters promise a new generation of displays," Laser Focus World, Feb. 1995.
D.R. Baigent et al., "Conjugated polymer light-emitting diodes on silicon substrates," Appl. Phys. Lett. 65(21), Nov. 21, 1994.
H.H. Kim et al., "Silicon Compatible Organic Light Emitting Diode," Journal of Lightwave Technology, vol. 12, No. 12, Dec. 1994.
V. Bulovic et al., "Transparent light-emitting devices," Nature, vol. 380, Mar. 7, 1996.
G. Gu et al., "Transparent organic light emitting devices," Appl. Phys. Lett. 68(19), May 6, 1996.

Affiliated with

Also associated with

Rating

Method for depositing indium tin oxide layers in organic light e does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for depositing indium tin oxide layers in organic light e, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for depositing indium tin oxide layers in organic light e will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1454851