Stage apparatus and exposure apparatus and device producing meth

Details Stage apparatus and exposure apparatus and device producing meth Stage apparatus and exposure apparatus and device producing meth

1997-02-10

1999-01-26

Mathews, A. A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 72, 359393, 2504922, G03B 2742

Patent

active

058643893

ABSTRACT:
A stage apparatus is provided with a table having a reference surface, support means for supporting the table, a first movable body movable in a first direction on the reference surface, first driving means for driving the first movable body, a second movable body movable in a second direction differing from the first direction with the first movable body as the reference, and second driving means for driving the second movable body, and the driving reaction forces of the first driving means and the second driving means are received by a base discrete from the table. Also, provision is made of a supporting mechanism for supporting the second driving means for minute displacement in the second direction relative to the first movable body. By this construction, the influence of a reaction force resulting from the acceleration and deceleration of the stage is made small.

REFERENCES:
patent: 4766465 (1988-08-01), Takahashi
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5382095 (1995-01-01), Akutsu
patent: 5446519 (1995-08-01), Makinouchi
patent: 5610686 (1997-03-01), Osanai
patent: 5701041 (1997-12-01), Akutsu et al.
patent: 5726548 (1998-03-01), Chiba et al.

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