Semiconductor wafer loading and unloading apparatus, and semicon

Details Semiconductor wafer loading and unloading apparatus, and semicon Semiconductor wafer loading and unloading apparatus, and semicon

1996-06-04

1998-06-02

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414217, 414222, 4147895, 414936, 414937, 414757, 53244, H01L 2168

Patent

active

057590060

ABSTRACT:
A transport container for transporting a plurality of semiconductor wafers as stacked therein. The container includes a box-shaped container body having four peripheral walls, and an upper lid for closing and opening an upper opening of the container body. The front wall of the container body is pivotable between an open position and a closed position. The upper lid and front wall are opened when the semiconductor wafers are loaded into or unloaded from the transport container. An apparatus is provided for loading and unloading the semiconductor wafers into/from the transport container. The apparatus includes a cassette table for supporting a cassette for storing the semiconductor wafers in multiple stages at predetermined intervals, a container table for supporting the transport container openable and closable for storing the semiconductor wafers stacked alternately with protective sheets of guard paper, and a robot arm substantially opposed to each of the cassette table and the container table for transporting the semiconductor wafers between the cassette and the transport container.

REFERENCES:
patent: 3693321 (1972-09-01), Nilsson
patent: 4806059 (1989-02-01), Gossl et al.
patent: 4842136 (1989-06-01), Nakazato et al.
patent: 5061144 (1991-10-01), Akimoto et al.

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