Method of producing silicon and similar wafers buffered for the

Details Method of producing silicon and similar wafers buffered for the Method of producing silicon and similar wafers buffered for the

1989-09-15

1991-06-18

Ryan, Patrick J.

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Of quartz or glass

428457, 428688, 428901, 428930, 505701, 427 62, B32B 900

Patent

active

050248944

ABSTRACT:
New Method of buffering silicon and similar semiconductor wafers with appropriate metal oxide layers which, in turn, have been found to be excellent substrates for MOS depositions without interaction with the semiconductor surface, and novel buffered wafers produced thereby.

REFERENCES:
James C. W. Chien, "Polymer Precursor Synthesis of High T.sub.c Superconductors", Polymer Bulletin 21, 1-4 (1989).
James C. W. Chien and B. M. Gong, "Polymer Precursor Synthesis and Characterization of YBa.sub.2 CU.sub.3 O.sub.7-x ", Physical Review B, vol. 38, No. 16, Dec. 1, 1988.

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