Vacuum-pressure-control slow exhaust valve

Details Vacuum-pressure-control slow exhaust valve Vacuum-pressure-control slow exhaust valve

1996-10-30

1998-12-15

Michalsky, Gerald A.

Fluid handling

Systems

Dividing into parallel flow paths with recombining

137630, 1376372, 251 60, F16K 31122

Patent

active

058486089

ABSTRACT:
To reduce the axial length of a slow exhaust valve and thus the size of the valve, a secondary valve seat and a secondary valve body constituting a secondary valve mechanism for restrictively opening a channel connecting a chamber port and a pump port during the first half of the exhaust process in order to limit the exhaust speed are incorporated in a primary valve body in a primary valve mechanism; a secondary-valve-body drive mechanism and a pressure-acting secondary chamber are incorporated inside a primary-valve-body drive member in the primary valve mechanism; and a secondary shaft that connects the secondary valve body and the secondary-valve-body drive member together is disposed inside a primary shaft.

REFERENCES:
patent: 4041979 (1977-08-01), Grotloh
patent: 4561464 (1985-12-01), Frantz
patent: 5172722 (1992-12-01), Nishimura
Japanese Abstract JPA-8-166085, Jun. 25, 1996 with English Abstract, Published Jun. 25, 1996.

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