System for depositing a material on a substrate using light ener

Details System for depositing a material on a substrate using light ener System for depositing a material on a substrate using light ener

1996-12-20

1999-11-09

Chin, Peter

Coating apparatus

With means to apply electrical and/or radiant energy to work...

Radiant heating

118300, 118620, 118642, 118666, 118667, 118712, 427487, 427490, 427492, 427493, 427521, 427542, 427557, 427558, 427559, 427581, 427595, B05B 500

Patent

active

059806370

ABSTRACT:
The present invention is generally directed to a process and a system for transforming a liquid into a solid material using light energy. In particular, a solution containing a parent material in a liquid form is atomized in a reaction vessel and directed towards a substrate. The atomized liquid is exposed to light energy which causes the parent material to form a solid coating on a substrate. The light energy can be provided from one or more lamps and preferably includes ultraviolet light. Although the process of the present invention is well suited for use in many different and various applications, one exemplary application is in depositing a dielectric material on a substrate to be used in the manufacture of integrated circuit chips.

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