Fork cover for vertical furnace

Details Fork cover for vertical furnace Fork cover for vertical furnace

1996-09-27

1999-11-09

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414785, 414937, B65G 100

Patent

active

059801867

ABSTRACT:
A semiconductor wafer carrier fork cover to prevent damage to prevent breakage of the semiconductor wafer carrier forks mounted on a robotic semiconductor wafer transfer system during preventative maintenance procedures is described. A semiconductor wafer carrier fork cover has a lower support unit. The lower support unit will fit onto the base of a robotic semiconductor wafer transfer system. An upper covering unit is integrally attached to the lower support unit and will shield the semiconductor wafer carrier forks during preventive maintenance procedures.

REFERENCES:
patent: 2690271 (1954-09-01), Marietta
patent: 2817792 (1957-12-01), Chew
patent: 4550242 (1985-10-01), Uehara et al.
patent: 4785962 (1988-11-01), Toshima
patent: 5217340 (1993-06-01), Harada et al.
patent: 5221176 (1993-06-01), Allen et al.
patent: 5380137 (1995-01-01), Wada
patent: 5382128 (1995-01-01), Takahashi et al.
patent: 5575608 (1996-11-01), Yau et al.

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