Control apparatus, a stage apparatus and a hard disk servo write

Details Control apparatus, a stage apparatus and a hard disk servo write Control apparatus, a stage apparatus and a hard disk servo write

1995-03-10

1998-03-10

Elmore, Reba I.

Boots, shoes, and leggings

364157, 364176, 364159, 360 75, 318561, G05B 1918, G11B 2102

Patent

active

057268797

ABSTRACT:
Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.

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"Robust Control in Automatic Industry", Oba and Kuraoka, Aug., 1991, vol. 30, No. 8, Journal of the Society of Instrument and Control Engineers, pp. 701-705.
Fundamental Theories for Automatic Control, Revised, Masubuchi, 1964, pp. 178-185.

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